Photofabrication of surface relief gratings (SRGs) by using two series of epoxy-based azobenzene functionalized polymers was investigated．Polymers with different degree of functionalization were designed and synthesized to understand the chemical intricacies involved at the molecular level in the photofabrication of SRG．The influences of degree of ago functionalization and type of azo groups on inscription rate of the surface relief gratings were studied carefully．It was found that the inscription rate increased with the degree of functionalization．Different type azo chromophores with the same backbone showed very different inscription rates of SRG．The hydrogen bond formed between carboxyl was helpful to the polymer chain mass migration．The azo polymer containing 4-carboxyazobenzene chromophores showed a significantly faster rate of surface deformation than the azo polymer bearing 4-nitroazobenzene chromophores．