ZHANG Qi-ming, Cui Shi-quan. A STUDY ON THE PHOTOSENSITIZATION OF MODIFIED POLY (GLYCIDYL METHACRYLATE). [J]. Acta Polymerica Sinica (6):475-479(1984)
DOI:
ZHANG Qi-ming, Cui Shi-quan. A STUDY ON THE PHOTOSENSITIZATION OF MODIFIED POLY (GLYCIDYL METHACRYLATE). [J]. Acta Polymerica Sinica (6):475-479(1984)DOI:
A STUDY ON THE PHOTOSENSITIZATION OF MODIFIED POLY (GLYCIDYL METHACRYLATE)
A Series of PGC was obtained by esterification of poly-(glycidyl methacrylate) (PGMA) with einnamic acid. NMR was used to determine the degree of esterification. The content of cross-linking under irradiation was quantitatively measured by UV
and confirmed by the gel-content test. It is foumd that the introduction of einnamic acid greatly increases the sensitivity to the dfarp UV. Thus
PGC is a highly enough sensitive negative resist without adding any sensitizer.