HONG Xiao-yin, LIU Dan, LI Zhong-zhe, DONG Gui-rong. EFFECTS OF POLYMERS UPON THE DEVELOPMENT FREE VAPOR PHOTOLITHOGRAPHY. [J]. Acta Polymerica Sinica (2):162-167(1994)
DOI:
HONG Xiao-yin, LIU Dan, LI Zhong-zhe, DONG Gui-rong. EFFECTS OF POLYMERS UPON THE DEVELOPMENT FREE VAPOR PHOTOLITHOGRAPHY. [J]. Acta Polymerica Sinica (2):162-167(1994)DOI:
EFFECTS OF POLYMERS UPON THE DEVELOPMENT FREE VAPOR PHOTOLITHOGRAPHY
he effects of several polymers upon the development free vapor photolithography (DFVP ) have been studied. Explanations of the difference in etching rates between unirradiated and irradiated areas
high resolution and high aspect ratio in DFVP were suggested.