In a capacitively coupled discharge with external electrodes

plasma polymerization of methane was studied. It was found that polymer deposition rate was accelerated when haloids were added in plasma

and effect of polymerization condition on the polymer deposition rate was confirmed at the same time. Results from IR

X-ray diffraction and elementary analysis show that plasma polymerized methane (PPM) has a cross-linked structure. PPM films have good thermostability. Refractive index and density of PPM films were determined byestablish-ed ellipitical polarization are 1.55 and 1.11 g/cm3respectively.