The Polymerization of hexafluoropropylene was studied by means of an apparatus with capacively coupling of external electrode. We have obtained better condition of polymerization and proved the effect of the obvious etching in the polymerization system with increasing discharge power. This effect was controlled by hydrogen as plasma gas. The results of X-ray diffraction and elemental analysis show that the polymer is of cross-linked structure. We have determined the contact angle and refractive index of the plasma-polymerization film of hexafluoropropylene. The obtained film exhibits good optical properties hydrophobic properties and themostability.