Compared to the traditional lithographic-based techniques for fabricating polyimide patterns

micropen direct-write deposition technique has many advantages such as simple

low-cost

maskless

flexible

etc. The poly(amic acid) (PAA) solution was synthesized based on the PMDA and ODA in DMAc solvent by the low temperature solution co-polymerization method

and viscosity of the PMDA-ODA PAA solutionwas adjusted to make it suitable for the micropen direct-write depositing process.Polyimide patterns are fabricated by two steps

the micropen direct-write deposits PAA solution

and then a cure heating cycle converts the PAA to the insoluble polyimide and drives out remaining solvent.An Au/PI micro-bridge array was fabricated by the micropen direct-write deposition technique

which indicated its potential applications in MEMS manufacture field.