功能薄膜形貌表征技术

宋静楠; 詹俊哲; 张明; 朱磊; 郝天雨; 徐锦秋; 周子春; 周冠清; 薛晓楠; 冯威; 张永明; 刘烽

doi:10.11777/j.issn1000-3304.2022.22118

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功能薄膜形貌表征技术

综述 (高分子表征技术专题) | 更新时间：2024-10-08

- 功能薄膜形貌表征技术
- Morphology Characterization Techniques of Functional Thin Films
- 高分子学报 2022年53卷第12期页码：1552-1566
- 作者机构：
  
  1.上海交通大学化学化工学院转化分子前沿科学中心氢科学中心物理科学原位中心上海 200240
  2.含氟功能膜材料国家重点实验室淄博 256401
- 作者简介：
  
  E-mail: fengliu82@sjtu.edu.cn
- 基金信息：
  
  国家重点研发计划(2020YFB1505500;2020YFB1505502)
- DOI：10.11777/j.issn1000-3304.2022.22118
  中图分类号：
- 纸质出版日期：2022-12-20，
  
  网络出版日期：2022-09-06，
  
  收稿日期：2022-04-11，
  
  录用日期：2022-05-23
- 稿件说明：
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宋静楠,詹俊哲,张明等.功能薄膜形貌表征技术[J].高分子学报,2022,53(12):1552-1566.

Song Jing-nan,Zhan Jun-zhe,Zhang Ming,et al.Morphology Characterization Techniques of Functional Thin Films[J].ACTA POLYMERICA SINICA,2022,53(12):1552-1566.
宋静楠,詹俊哲,张明等.功能薄膜形貌表征技术[J].高分子学报,2022,53(12):1552-1566. DOI： 10.11777/j.issn1000-3304.2022.22118.

Song Jing-nan,Zhan Jun-zhe,Zhang Ming,et al.Morphology Characterization Techniques of Functional Thin Films[J].ACTA POLYMERICA SINICA,2022,53(12):1552-1566. DOI： 10.11777/j.issn1000-3304.2022.22118.

摘要

功能薄膜在光电器件、燃料电池、储能电池、气体分离、微电子及生物医学等领域表现出极大的应用潜力

成为学术界和工业界的研究重点. 理解薄膜内部形貌形成机理，调控结晶行为和相分离结构，是提高薄膜器件性能的重要途径. 散射技术，包括同步辐射X射线广角/小角散射(GIWAXS/GISAXS)、小角中子散射(SANS)、共振软X射线散射(RSoXS)，作为表征薄膜内部微纳结构的有效手段，不仅可以研究薄膜材料的结晶行为，包括结晶强度、分子堆积方式和取向性质，还可以研究薄膜内的相分离行为和界面取向与粗糙度等结构细节. 同时，原位散射技术可以实时检测薄膜形貌的形成过程，对理解非平衡态形貌形成机制具有重要意义. 本文不仅总结了GIWAXS、GISAXS、SANS、RSoXS和原位散射技术的基本工作原理，还通过经典案例详尽地介绍了各形貌表征技术的功能和数据解析过程，为科研工作者快速选择合适的形貌表征技术提供指导作用.

Abstract

The functional thin films have great application potential in the field of optoelectronic device

fuel cells

energy storage cells

gas separation

microelectronics and biomedicine

thus becoming the research focus of academia and industry. Understanding the mechanism of morphology evolution

controlling the crystallization properties and phase separation structure are critical in improving device performance. However

in most cases

traditional morphology characterization techniques

such as transmission electron microscopy (TEM) and atomic force microscopy (AFM)

failed to describe the morphology and phase separation structure of blend films due to the limited resolution. The emergence of advanced X-ray and Neutron scattering techniques can solve this problem well

allowing us to deeply understand the structure-performance correlations and providing constructive instructions to optimize device performance. For example

grazing incidence wide-angle X-ray scattering (GIWAXS) can be used to characterize crystallization behavior

and provide more detailed crystallization information

such as crystallinity

crystal size

crystal orientation and molecular packing. Grazing incidence small-angle X-ray scattering (GISAXS)

small angle neutron scattering (SANS)

and resonant soft X-ray scattering (RSoXS) are complementary m

ethods for characterizing the multiscale phase separation structures

and providing the information of phase separation size

aggregates size

interfacial molecular orientation and roughness. Meanwhile

in situ

GIWAXS and GISAXS techniques can be used to characterize the morphology evolution process from the precursor solution to thin film

which is of great significance to understand the formation mechanism of non-equilibrium morphology and realize controllable regulation of morphology. Here

we systematically summarize the most important characterization techniques

such as GIWAXS

GISAXS

SANS

RSoXS

and

in situ

GIWAXS/GISAXS

from two aspects: basic principle and application. In the application section

we take some classical cases to show how to characterize morphology and how to analyze data in a rational way. This summary is convenient for chemists and material scientists to quickly understand the principles and functions of various morphology characterization techniques

and provide instructions on how to choose proper method to study thin film morphology.

关键词

薄膜光伏散射技术微纳结构结晶特性相分离结构

Keywords

Thin film photovoltaicScattering techniqueMicro-nano structureCrystallization characteristicsPhase separation structure

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