单一分子量含氟嵌段共聚物的本体及薄膜自组装研究

吴海兵; 蒋胜喜; 谭睿; 刘雨欣; 董学会; 张正彪

doi:10.11777/j.issn1000-3304.2023.23200

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单一分子量含氟嵌段共聚物的本体及薄膜自组装研究

研究论文 | 更新时间：2024-01-19

- 单一分子量含氟嵌段共聚物的本体及薄膜自组装研究
  增强出版
- Investigation of Bluk and Thin-film Self-assembly Using Discrete Fluorine-containing Block Copolymers
- 高分子学报 2024年55卷第2期页码：142-152
- 作者机构：
  
  1.苏州大学材料与化学化工学部苏州 215123
  2.华南理工大学前沿软物质学院广州 510640
- 作者简介：
  
  Rui Tan, E-mail: ruitan@suda.edu.cn
  xdong@scut.edu.cn
  zhangzhengbiao@suda.edu.cn
- 基金信息：
  
  国家自然科学基金(基金号 21925107);中国博士后科学基金(基金号第71批,2022M712306)资助项目
- DOI：10.11777/j.issn1000-3304.2023.23200
  中图分类号：
- 纸质出版日期：2024-02-20，
  
  网络出版日期：2023-12-27，
  
  收稿日期：2023-07-28，
  
  录用日期：2023-11-06
- 稿件说明：
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吴海兵, 蒋胜喜, 谭睿, 刘雨欣, 董学会, 张正彪. 单一分子量含氟嵌段共聚物的本体及薄膜自组装研究. 高分子学报, 2024, 55(2), 142-152

Wu, H. B.; Jiang, S. X.; Tan, R.; Liu, Y. X.; Dong, X. H.; Zhang, Z. B. Investigation of bluk and thin-film self-assembly using discrete fluorine-containing block copolymers. Acta Polymerica Sinica, 2024, 55(2), 142-152
吴海兵, 蒋胜喜, 谭睿, 刘雨欣, 董学会, 张正彪. 单一分子量含氟嵌段共聚物的本体及薄膜自组装研究. 高分子学报, 2024, 55(2), 142-152 DOI： 10.11777/j.issn1000-3304.2023.23200.

Wu, H. B.; Jiang, S. X.; Tan, R.; Liu, Y. X.; Dong, X. H.; Zhang, Z. B. Investigation of bluk and thin-film self-assembly using discrete fluorine-containing block copolymers. Acta Polymerica Sinica, 2024, 55(2), 142-152 DOI： 10.11777/j.issn1000-3304.2023.23200.

摘要

嵌段共聚物导向自组装作为一种自下而上的图案化工艺，受到工业界和学术界的广泛关注. 然而，导向自组装中缺陷率与分子参数之间的关系研究尚不清晰. 本文工作基于模块化合成策略，利用迭代指数增长法并结合巯基-双键的点击反应成功制备了高

低

的单一分子量含氟聚酯嵌段共聚物(

-FPOSS). 单一分子量特征可以排除多分散性对自组装行为的影响. 本体自组装研究表明聚酯嵌段和含氟嵌段具有强相分离驱动力，可以形成特征尺寸小于10 nm的六方柱状相结构(HEX). 在薄膜自组装中，嵌段共聚物经过简单的热退火可以在硅片表面形成平行基底排布的柱状纳米图案. 此外，通过对比研究不同链长单一分子量嵌段共聚物的薄膜组装行为，发现随着嵌段共聚物链长的增长薄膜组装图形缺陷率明显下降，初步揭示了薄膜自组装过程中缺陷形成对嵌段共聚物链长的依赖性.

Abstract

Directed self-assembly of block copolymers has arouse tremendous interest from academy and industry as a bottom-up patterning process to fabricate versatile nanostructures. However

the underlying principles between molecular parameters and defectivities in directed self-assembly are still unambiguous due to the limitations of traditional polydisperse polymer models. Discrete polymer with defined molecular structure and uniform chain length are ideal candidates to reveal the fundamental principles. In this study

based on the modular synthesis strategy

discrete fluorine-containing polyester block copolymers (

-FPOSS) with high

-low

were firstly prepared by iterative exponential growth in combination with the thiol-ene click reaction. Owing to the discrete feature

the influence of polydisperse molecular parameters including composition

molecular weight and distribution on self-assembly behaviors can be completely excluded. Consequently

the impacts of molecular structures on the evolution of phase segregation can be quantitatively revealed. Due to the strong segregation strength

hexagonally packed cylindrical nanostructures (HEX) less than 10 nm can be formed in bulk and the phase stability increases with the chain length of

LA block. In thin-film self-assembly

parallelly oriented cylindrical nanopatterns on Si substrate were clearly identified after brief annealing under vacuum. In addition

through comparative studies of thin-film self-assembly behaviors of discrete block copolymers with different chain lengths

the nanopattern defectivity decreased significantly with the increase of

LA block chain length

which initially revealed the dependence of defect formation on block copolymer chain length in thin-film self-assembly.

关键词

单一分子量高分子导向自组装含氟嵌段共聚物本体及薄膜自组装光刻

Keywords

Discrete polymerDirected self-assemblyFluorine-containing block copolymerBulk and thin film self-assemblyLithography

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